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Application rel. sys. engineering

We are flexible in designing and implementing fluid engineering systems. Both in the area of pressure generation and processing and in the areas of driving, controlling and moving.

 

 

Telescopic cylinder system for wafer handling in semiconductor production


Telescopic cylinder system for wafer handling in semiconductor production

Special coating machines are used to produce semiconductors in high vacuum on silicon disks, the wafers. Some thousands of semiconductors can be located on one single 12”-wafer. For the different processes the wafers have to be moved inside the machine several times. Telescopic cylinders with 180 mm and 280 mm dia. located annular in the machine and being switched after each cycle are handling the wafers. The different media necessary for the process are led through the piston rods.

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