Pneumatik, Hydropneumatik, Systemtechnik
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Application rel. sys. engineering

We are flexible in designing and implementing fluid engineering systems. Both in the area of pressure generation and processing and in the areas of driving, controlling and moving.

 

 

Cylinder system with integrated ball guides for wafer handling in semiconductor production


Cylinder system with integrated ball guides for wafer handling in semiconductor production

This cylinder system is positioning printing masks during the semiconductor production process. The housing is machined from one block. Integrated ball guides allow highest precision and reproducibility of the both cylinders. Several positions of the cylinders can be monitored by integrated sensors. Adjustable end position dampers ensure a vibration-free work.

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